[skip navigation]National Institute of Standards and TechnologyNational Institute of Standards and Technology - TimeNational Institute of Standards and Technology - Home PageNational Institute of Standards and Technology - About NISTNational Institute of Standards and Technology - Contact UsNational Institute of Standards and Technology - A-Z Site IndexNIST Physical Measurement LaboratoryPML Semiconductor & Dimensional Metrology DivisionSDMD Dimensional Metrology GroupSDMD Surface & Nanostructure Metrology GroupSDMD Nanoscale Metrology GroupSDMD Nanoelectronics GroupSDMD Advanced Device Reliability & Characterization Group
 Selected Publications 

Selected Publications is a web-based collection of publications about dimensional metrology.

Download Free Acrobat Reader
PDF Icon

Thermal Effects in Dimensional Metrology; UCRL-12409; 1965

Brewer, W.; Bryan, J.; McClure, E.; Pearson, J.

UCRL-12409; 66p. 22 February 1965.

A Lawrence Radiation Laboratory investigation of thermal effect in dimensional metrology shows that, in the field of close tolerance work, thermal effect is the largest single source of error, large enough to make corrective action necessary if modern measurement systems and machine tools are to attain their potential accuracies. This paper is an effort to create an awareness of the thermal environment problem and to suggest some solutions. A simple, quantitative, semiexperimental method of thermal error evaluation is developed. It is shown, experimentally and theoretically, that the frequency of temperature variation is as important as the absolute limits of the temperature variation. and that the sensitivity of machine structures to thermal vibration can be minimized by selecting environmental frequencies to avoid resonant conditions. A relatively simple device to monitor the thermal environment and automatically effect error compensation is proposed.

Return to Top of Document

Web Site Home: Engineering Metrology Toolbox
Technical Inquiries: Daniel S. Sawyer, Group Leader
Dimensional Metrology
Semiconductor and Dimensional Metrology Division
Physical Measurement Laboratory
NIST, 100 Bureau Drive, Stop 8211, Gaithersburg, MD 20899-8211

The National Institute of Standards and Technology (NIST) is an agency of the U.S. Department of Commerce.
NIST / PML / Semiconductor and Dimensional Metrology Division

NIST Program Questions: Public Inquires Unit
(301) 975-NIST (6478) TTY (301) 975-8295
NIST, 100 Bureau Drive, Stop 3460, Gaithersburg, MD 20899-3460

Privacy Policy / Security Notice / Accessibility Statement / Disclaimer / Freedom of Information Act (FOIA) / 
Environmental Policy Statement / No Fear Act Policy / (performance of federal programs) / 
NIST Information Quality Standards / Scientific Integrity Summary

Date Created: Friday, October 18, 2002
Last Updated: Wednesday, December 28, 2011
Technical Web Site Questions: Jay Zimmerman
Feedback and Comments: Webmaster