Precision Engineering Division
[skip navigation]NIST Manufacturing Engineering LaboratoryNational Institute of Standards and TechnologyPrecision Engineering DivisionPrecision Engineering DivisionLarge-Scale Coordinate MetrologyEngineering MetrologySurface and Microform MetrologyNanoscale MetrologySearch
  ENGINEERING METROLOGY TOOLBOX  
 Selected Publications 

Selected Publications is a web-based collection of publications about dimensional metrology.

Download Free Acrobat Reader
PDF Icon

The Calibration of an Optical Flat by Interferometric Comparison to a Master Optical Flat; NBSIR 75-975; 1975


Reeve, C.

NBS Internal Report 75-975; 39p. December 1975.

Keywords:
Calibration; diameter; gravitational bending; interferometry; least squares line; linear model; optical flat; profile; standard deviation; uncertainty.

Abstract:
Optical flats are normally calibrated by one of two methods at the National Bureau of Standards. The most frequently used method involves a direct interferometric comparison of a test flat to a master flat. The purpose of this paper is to present a detailed description of this measurement process. Some of the topics discussed are methods of supporting the flats, effects of gravitational bending, measurement of interference fringes, formulation and solution of the linear least squares model, analysis of errors, choice of profile reference line, and display of profiles. An example is worked out in a step-by-step fashion in order to illustrate the process, and a statistical test is incorporated to check whether the process is in control.


Return to Top of Document

Web Site Home: Engineering Metrology Toolbox
Technical Inquiries: Ted Doiron, Group Leader
Engineering Metrology
Precision Engineering Division
Manufacturing Engineering Laboratory
NIST, 100 Bureau Drive, Stop 8211, Gaithersburg, MD 20899-8211

NIST / MEL / Precision Engineering Division

NIST Program Questions: Public Inquires Unit
(301) 975-NIST (6478) TTY (301) 975-8295
NIST, 100 Bureau Drive, Stop 3460, Gaithersburg, MD 20899-3460
Technical Web Site Questions: Jay Zimmerman
Privacy Policy, Security Notice, and Accessiblity Statement
Disclaimer / Freedom of Information Act (FOIA) / No Fear Act Policy
NIST Information Quality Standards / Feedback and Comments

NIST is an agency of the: U.S. Department of Commerce

Date Created: Friday, October 18, 2002
Last Updated: Tuesday, May 03, 2005